Improved Surface Smoothness of YBa_2Cu_3O_y Films and Related Multilayers by ArF Excimer Laser Deposition with Shadow Mask "Eclipse Method"
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-03-15
著者
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KOBAYASHI Takeshi
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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KINOSHITA Kazuya
Department of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Scie
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Ishibashi Hiroshi
Faculty Of Engineering Yokohama National University
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Kobayashi Takeshi
Department Of Biological Chemistry College Of Bioscience And Biotechnology Chubu University
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Kinoshita K
Assoc. Super‐advanced Electronics Technol. Yokohama Jpn
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Ishibashi H
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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ISHIBASHI Hiroshige
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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