Reduction of Pinhole Leakage Current of SrTiO_3 Films by ArF Excimer Laser Deposition with Shadow Mask ("Eclipse Method")

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-04-15

著者

• KOBAYASHI Takeshi

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• KINOSHITA Kazuya

  Department of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Scie

• Ishibashi Hiroshi

  Faculty Of Engineering Yokohama National University

• Kobayashi Takeshi

  Department Of Biological Chemistry College Of Bioscience And Biotechnology Chubu University

• Kinoshita K

  Assoc. Super‐advanced Electronics Technol. Yokohama Jpn

• Ishibashi H

  Matsushita Electric Industrial Co. Ltd. Osaka Jpn

• IWABUCHI Mamoru

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• ISHIBASHI Hiroshige

  Department of Electrical Engineering, Faculty of Engineering Science, Osaka University

• Iwabuchi M

  Department Of Electrical Engineering Faculty Of Engineering Science Osaka University

• Iwabuchi Mamoru

  Department Of Electrical Engineering Faculty Of Engineering Science Osaka University

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