A High Resolution Cathodoluminescence Microscopy Utilizing Magnetic Field : Semiconductors and Semiconductor Devices
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概要
- 論文の詳細を見る
We propose a new principle to improve spatial resolution of cathodoluminescence microscopy (CL). The principle, which we named Lorentz force carrier confinement (LC), is to block the lateral diffusion by placing carriers in a circular orbit in terms of the Lorentz force under a vertical magnetic field. Detailed hetero-interface structures of GaAs-AlGaAs quantum wells have been successfully visualized, using the principle. The spatial resolution of LC-CL is improved to be a few thousand Angstrom by applying 0.8 Tesla.
- 社団法人応用物理学会の論文
- 1988-10-20
著者
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Wada Kazumi
NTT LSI Laboratories
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Inoue Naohisa
Ntt Lsi Laboratories
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Fushimi Hiroshi
Technological University Of Nagaoka
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KOZEN Atsuro
NTT Optoelectronics Laboratories
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