Dependence of YBa_2Cu_3O_<7-x> Ultrathin Film Surface Morphology on Substrate and Growth Temperature
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概要
- 論文の詳細を見る
We have studied the influence of substrate matching and growth temperature on the morphology of YBa_2Cu_3O_<7-x> ultrathin film. For films grown on SrTiO_3 and NdGaO_3 substrates, we observed a temperature-dependent surface morphology. The film changed from a smooth epitaxial layer at growth temperatures equal to or below 750℃, into one with several unit-cell-high islands at 800℃. It was also found that the density of these islands differs between films on SrTiO_3 and NdGaO_3 substrates. This substrate-dependent island density was interpreted in terms of the Stransky-Krastanov-type film structure model together with an assumed temperature dependence of the epitaxial layer thickness.
- 社団法人応用物理学会の論文
- 1996-08-01
著者
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向田 昌志
山形大学工学部電気電子工学科
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Mukaida Masashi
Kyushu Univ. Fukuoka Jpn
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Uehara Shingo
Faculty of Engineering, Seikei University
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Uehara Shingo
Faculty Of Engineering Seikei University
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Mukaida Masashi
NTT LSI Laboratories
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MUKAIDA Masashi
NTT System Electronics Laboratories
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TSURUMAKI Takashi
Faculty of Engineering, Seikei University
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向田 昌志
九州大学・大学院工学研究院・材料工学部門
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Tsurumaki Takashi
Faculty Of Engineering Seikei University:(present Address) Mitsubishi Electric Corporation
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