Nature of Preferred Orientation of YBa_2Cu_3O_x Thin Films
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概要
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To clarify a preferential orientation of YBa_2Cu_3O_x thin films, the growth parameters of a- and c-axis oriented thin films are investigated. YBa_2Cu_3O_x thin films are grown on different lattice-mismatching substrates, such as Nd: YAlO_3 (001), LaAlO_3 (100), NdGaO_3 (110), PrGaO_3 (001), SrTiO_3 (100) and MgO (100) by pulsed laser deposition (PLD) to determine the a- and c-axis preferential orientation phase diagrams. These a- and c-axis preferential orientations are controlled by the lattice constant of the substrate, the substrate temperature during deposition, the oxygen pressure in the growth chamber, and the laser power. The existence of a c-axis oriented YBa_2Cu_3O_z layer between the substrate and a-axis oriented YBa_2Cu_3O_x thin films is explained.
- 社団法人応用物理学会の論文
- 1993-10-15
著者
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Mukaida Masashi
NTT LSI Laboratories
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Miyazawa Shintaro
NTT LSI Laboratories
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Miyazawa S
Ushio Res. Inst. Technol. Inc. Shizuoka Jpn
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