Water Vapor Effects on Titanium Diffusion into LiNbO_3 Substrates
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概要
- 論文の詳細を見る
This paper describes experimental studies on titanium diffusion into Z-cut LiNbO_3 substrates as a function of water vapor content in the diffusion atmosphere of oxygen and argon. LiNbO_3 crystal characteristics were found to depend mainly on water vapor content, while Ti-diffusion characteristics were found to be affected not only by water vapor content but also by the type of carrier gas. This study has important implications for the successful fabrication of Ti-diffused LiNbO_3 waveguides; for oxygen carrier gas, a small amount of water vapor should be introduced, while for argon carrier gas, a medium amount of water vapor should be introduced.
- 社団法人応用物理学会の論文
- 1990-10-20
著者
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Miyazawa Shintaro
NTT LSI Laboratories
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Miyazawa S
Ushio Res. Inst. Technol. Inc. Shizuoka Jpn
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NOZAWA Toshinori
Nippon Telegraph and Telephone Corporation, Opto-electronics Laboratories
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MIYAZAWA Hiroshi
Nippon Telegraph and Telephone Corporation, NTT Opto-electronics Laboratories
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Nozawa T
Nippon Telegraph And Telephone Corp. Ibaraki Jpn
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Nozawa Toshinori
Nippon Telegraph And Telephone Corporation Opto-electronics Laboratories
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Miyazawa Hiroshi
Nippon Telegraph And Telephone Corporation Ntt Opto-electronics Laboratories
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