Influence of the Purity of Source Precursors on the Electrical Properties of Pb (Zr, Ti) O_3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1998-09-01
著者
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Niu Hirohiko
Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University
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Shimizu Mitsuaki
Power Electronics Research Center National Institute Of Advanced Industrial Science And Technology
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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FUJISAWA Hironori
Himeji Institute of Technology, Faculty of Engineering, Department of Electronics
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YOSHIDA Masahiro
Himeji Institute of Technology, Faculty of Engineering, Department of Electronics
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SHIMIZU Masaru
Himeji Institute of Technology, Faculty of Engineering, Department of Electronics
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NIU Hirohiko
Himeji Institute of Technology, Faculty of Engineering, Department of Electronics
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Yoshida Masahiro
Himeji Institute Of Technology Faculty Of Engineering Department Of Electronics
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