Optical Propagation Loss Increase of (GdBi)_3Fe_5O_<12> Films Caused by Sputter Etching

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概要

• 論文の詳細を見る

• Rib waveguides, which are made of magnetic garnet films of composition (GdBi)_3Fe_5O_<12> and are fabricated by Ar sputter etching, have large optical propagation loss when Ti is used as the etch mask. The loss increase is alleviated by using a SiO_2 mask. X-ray photoelectron spectroscopy analysis reveals that Fe chemical shift due to Ar^+ ion bombardment causes increase in the optical absorption loss, and hence the propagation loss.

• 社団法人応用物理学会の論文
• 1995-09-15

著者

• MIZUMOTO Tetsuya

  Department of Electrical and Electronic Engineering, Tokyo Institute of Technology

• Naito Yoshihiko

  Institute Of Space And Astronautical Science

• Yokoi Hideki

  Department of Biochemistry, College of Agriculture, Kyoto Prefectural University

• Yokoyama H

  Tokyo Inst. Technol. Yokohama Jpn

• Yokoi H

  Tokyo Inst. Technol. Tokyo Jpn

• Yokoi Hideki

  Department Of Electrical And Electronic Engineering Graduate School Of Science And Engineering Tokyo

• Yokoi H

  Graduate School Of Science And Engineering Tokyo Institute Of Technology

• NAITO Yoshiyuki

  Department of Anesthesia, Kobe City General Hospital

• Naito Y

  Kobe City General Hospital Kobe Jpn

• Naito Yoshiyuki

  Department Of Anesthesia Kobe City General Hospital

• Mizumoto T

  Tokyo Inst. Technol. Tokyo Jpn

• Mizumoto Tetsuya

  Department Of Eee Tokyo Institute Of Technology

• Yokoi H

  Department Of Electrical And Electronic Engineering Graduete School Of Science And Engineering Tokyo

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