Necessary Conditions for Generating Intense Cluster Beam
スポンサーリンク
概要
- 論文の詳細を見る
There is a critical value for the pressure in the nozzle skimmer region above which no cluster beam can be generated. This result is in general agreement with that calculated from the flow accompanied with condensation. There also is a critical distance between the nozzle and the skimmer beyond which clusters disintegrate into molecules. This phenomenon is due to Mach disk formation. The location of the Mach disk is obtained from Pitot tube readings P_T on the beam axis and its validity is confirmed by measuring radial distributions of P_T.
- 社団法人応用物理学会の論文
- 1975-07-05
著者
-
Okamoto Kazuya
Central Research Laboratory Nikon Corporation
-
OKAMOTO Kosuke
The Institute of Physical and Chemical Research
-
Yano Koji
Department Of Electrical And Electronic Engineering Faculty Of Engineering University Of Yamanashi
-
Be Suck
The Institute Of Physical And Chemical Research
-
YANO katsuki
The Institute of Physical and Chemical Research
-
Enjoji Hiroshi
The Institute Of Physical And Chemical Research
関連論文
- Effect of Substrate Bias on Silicon Thin-Film Growth in Plasma-Enhanced Chemical Vapor Deposition at Cryogenic Temperatures
- A Multichannel System for Determination of Time Varying Spectral Line Profiles
- Fine SiO_2 Pattern Generation by Electron Beam Direct Writing onto Polysiloxene-Based Thin Films and Its Application to Etch Mask
- Fine SiO_2 Pattern Generation by Excimer Laser-Induced Modification of Polysiloxene-Based Thin Films
- Sub-Half-Micron Silicon Pattern Generation by Electron Beam Direct Writing on Polysilane Films
- Zn and Si Doping in {110} GaAs Epilayers Grown by Metalorganic Chemical Vapor Deposition : Semiconductors and Semiconductor Devices
- Lateral Growth on (110) GaAs Substrates by Metalorganic Chemical Vapor Deposition : Semiconductors and Semiconductor Devices
- Enhancement of the Transport Critical Current Density by Electron Irradiation in a Bi_Pb_Sr_2Ca_2Cu_3O_x Ceramic
- Electron Irradiation Effects on the Transport Critical Current Density in a Bi_Pb_Sr_2Ca_2Cu_3O_x Ceramic
- Gamma Irradiation Effect on the Transport Critical Current Density of a Bi_Pb_Sr_2Ca_2Cu_3O_x Ceramic
- Transport Critical Current Density in a Bi_PbSr_2Ca_2Cu_3O_ Ceramic
- High-Fluidity Deposition of Silicon by Plasma-Enhanced Chermical Vapor Deposition Using Si_2H_6 or SiH_4
- Image Conservation in Inelastically Scattered Electrons in Reflection Electron Microscopy
- Analysis of Output Power Degradation for Tunnel Metal-Insulator-Semiconductor Solar Cell
- Growth of p-type Zinc Oxide Films by Chemical Vapor Deposition
- Application of a Junction Field Effect Transistor Structure to a Low Loss Diode
- Improvement of Open Circuit Voltage of SnO_2-nSi Solar Cells
- Application of a Junction FET Structure to a Low Loss Diode
- Design features of a new ultra-high vacuum electron microscope with an omega filter
- ECR-Discharge Cleaning for Liner-Containing Tokamaks
- Measurement of Hydrogen Atom Flux from ECR Plasma
- A Predischarge Doping Method for Hydrogenated Amorphous Silicon Films
- Detection of Ion Wave in Electron-Beam-Plasma by Optical Correlation
- A Study of Electron Beam Collector with Ionization Cavity
- Design and Fabrication of Monolithically Integrated Lateral-Electrode Etched-Mirror Laser with Y-Branch Single-Mode Waveguide in GaAs/AlGaAs
- Formation of High-Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325 nm Laser Holographie Exposure
- Characterization of P- and N-Type Impurity Diffusions in GaAs from Doped Silica Films
- Fabrication of TE/TM Mode Splitter Using Completely Buried GaAs/GaAlAs Waveguide
- Lateral Supply Mechanisms in Selective Metalorganic Chemical Vapor Deposition
- Gamma Irradiation Effect on a Bi_Pb_Sr_2Ca_2Cu_3O_ Superconductor
- A Hot Plasma Produced by a Linear Discharge Device with a Large Capacity Condenser Bank
- Multiple Stage Cluster Beam Ionizer
- Determination of Surface Tension of Nitrogen Clusters
- Mass Analyses of Cluster Ion Beams by Wien Filter
- Necessary Conditions for Generating Intense Cluster Beam
- Ionization of Nitrogen Cluster Beam
- Influence of Pressure in Nozzle-Skimmer Region on Generation of Nitrogen Cluster Beam
- The Cumulative Ionization Effect in a 1.15 μm He-Ne Laser
- Experiments on Current Change with the Interruption of the laser beam
- Predictions of Cluster Beam Production with Slit-Throat Nozzle by Classical Condensation Theory
- Helical Instability of a Linear Discharge Plasma Produced by a Large Capacity Condenser Bank
- The Performance Characteristics of a St707 Non-Evaporable Getter Strip for SPring-8 (第30回真空に関する連合講演会プロシ-ディングス)
- Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)