Ionization of Nitrogen Cluster Beam
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概要
- 論文の詳細を見る
A nitrogen cluster beam (neutral particle intensity of 28.6 mA_<eq>) is ionized by electron collisions in a Bayard-Alpert gauge type ionizer. The extraction efficiency of about 65% is obtained at an electron current of 10 mA with an energy of 50 eV. The mean cluster size produced at a pressure of 663 Torr and temperature of 77.3 K is 2×10^5 molecules per cluster. By the Coulomb repulsion force, multiply ionized cluster ions are broken up into smaller fragments and the cluster ion size reduces to one-fourth at an electron current of 15 mA. Mean neutral cluster sizes depend strongly on the initial degree of saturation Φ_0 and are 2×10^5, 7×10^4 and 3×10^4 molecules per cluster at Φ_0's of 0.87, 0.66 and 0.39, respectively.
- 社団法人応用物理学会の論文
- 1975-04-05
著者
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Okamoto Kazuya
Central Research Laboratory Nikon Corporation
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OKAMOTO Kosuke
The Institute of Physical and Chemical Research
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Yano Koji
Department Of Electrical And Electronic Engineering Faculty Of Engineering University Of Yamanashi
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Be Suck
The Institute Of Physical And Chemical Research
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YANO katsuki
The Institute of Physical and Chemical Research
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Enjoji Hiroshi
The Institute Of Physical And Chemical Research
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