Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)
スポンサーリンク
概要
著者
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Be Suck
The Institute Of Physical And Chemical Research
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IN Sang
The Institute of Physical and Chemical Research (RIKEN)
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TAKAHASHI Sunao
The Institute of Physical and Chemical Research (RIKEN)
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DAIBO Hidemi
The Institute of Physical and Chemical Research (RIKEN)
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MARUYAMA Takashi
Osaka Vacuum, LTD.
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YOKOUCHI Shigeru
The Institute of Physical and Chemical Research (RIKEN)
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- Sensitivity Calibration of Ionization Gauges for Various Gases Using a Spinning Rotor Gauge (SRG)