Fabrication of AlGaN-Based Waveguides by Inductively Coupled Plasma Etching
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概要
- 論文の詳細を見る
- 2004-10-15
著者
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SUGIYAMA Masakazu
Graduate School of Engineering, The University of Tokyo
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SHIMOGAKI Yukihiro
Graduate School of Engineering, The University of Tokyo
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NAKANO Yoshiaki
Research Center for Advanced Science and Technology, The University of Tokyo
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LI Ning
Research Department of Natural Medicine, Shenyang Pharmaceutical University
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Nakano Yoshiaki
Research Center For Advanced Science And Technology The University Of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology Univ. Of Tokyo
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Nakano Yoshiaki
Graduate School Of Engineering The University Of Tokyo
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Sugiyama Masaaki
R & D Laboratories-i Central R & D Bureau Nippon Steel Cotporation
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Kumtornkittikul Chaiyasit
Research Center For Advanced Science And Technology Univ. Of Tokyo
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Li Ning
Research Department Of Natural Medicine Shenyang Pharmaceutical University
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Sugiyama M
Department Of Electric Engineering And Information Systems School Of Engineering The University Of T
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Liang Ji-hao
R&d Center Stanley Electric Company Limited
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Sugiyama Munehiro
Ntt Interdisciplinary Research Laboratories
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Nakano Y
Research Center For Advanced Science And Technology The University Of Tokyo
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Waki Ichitaro
Graduate School Of Engineering The University Of Tokyo
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LIANG Ji-Hao
R&D Center, Stanley Electric Company Limited
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Shimogaki Y
Department Of Materials Engineering School Of Engineering The University Of Tokyo
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Li Ning
Research Center For Advanced Science And Technology The University Of Tokyo
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Nakano Yoshiaki
Research Center For Advanced Science And Technology (rcast) At The University Of Tokyo
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