Micro/Nano Mechatronics. Microsystem for Telecommunication.

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概要

• 論文の詳細を見る
• 東京大学生産技術研究所の論文

著者

• Collard Dominique

  Institute D'electronique Et De Microelectronique Du Nord France

• Buchaillot Lionel

  Institut D'electronique Et De Micro-electronique Du Nord Iemn Umr Cnrs 8520

• Collard Dominique

  Institute of Industrial Science, The University of Tokyo

関連論文

• Fabrication of an Inverted Scratch-Drive-Actuator for a Pwerful and Precise Conveyance System
• FEM Analysis of Mechanical Characteristics of Nano Tweezers with MemsOne^
• Influence of the Step Covering on Fatigue Phenomenon for Polycrystalline Silicon Micro-Electro-Mechanical-Systems (MEMS) : Instrumentation, Measurement, and Fabrication Technology
• Micro/Nano Mechatronics. Microsystem for Telecommunication.

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