Influence of the Step Covering on Fatigue Phenomenon for Polycrystalline Silicon Micro-Electro-Mechanical-Systems (MEMS) : Instrumentation, Measurement, and Fabrication Technology
スポンサーリンク
概要
- 論文の詳細を見る
This paper reports results on the reliability of polycrystalline silicon structures, particularly the influence of step covering on fatigue during operation. In situ test benches have been designed and fabricated allowing the application of elementary solicitations (bending and torsion) to representative samples. These devices are useful to study the influence of step covering on fatigue phenomenon. Fatigue tests have been performed in a high vacuum chamber (10^<-6> Torr). Characterizations focused on the determination of the first natural frequency versus the number of functioning cycles, and the surface evolution of polycrystalline silicon via in situ atomic force microscopy examination. Moreover, a theoretical analysis using Finite Element Method has been performed.
- 社団法人応用物理学会の論文
- 2002-11-15
著者
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Collard Dominique
Cirmm Iis-cnrs Institute Of Industrial Sciences The University Of To
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Legrand Bernard
Institut D'electronique De Microelectronique Et De Nanotechnologie
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Legrand Bernard
Institut D'electronique Et De Micro-electronique Du Nord Iemn Umr Cnrs 8520
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MILLET Olivier
Institut d'Electronique et de Micro-Electronique du Nord, IEMN, UMR CNRS 8520
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BUCHAILLOT Lionel
Institut d'Electronique et de Micro-Electronique du Nord, IEMN, UMR CNRS 8520
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Millet Olivier
Institut D'electronique Et De Micro-electronique Du Nord Iemn Umr Cnrs 8520
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Buchaillot Lionel
Institut D'electronique Et De Micro-electronique Du Nord Iemn Umr Cnrs 8520
関連論文
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- Influence of the Step Covering on Fatigue Phenomenon for Polycrystalline Silicon Micro-Electro-Mechanical-Systems (MEMS) : Instrumentation, Measurement, and Fabrication Technology
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