Fabrication of Deep Silicon Microstructures by the Combination of Anodization and p^<++> Etch Stop
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概要
- 論文の詳細を見る
- 2010-07-01
著者
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Tanaka Shuji
Department Of Nanomechanics Tohoku University
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Esashi Masayoshi
Micro Nanomachining Research And Education Center Graduate School Of Engineering Tohoku University
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OHNO Takeo
Micro Nanomachining Research and Education Center, Graduate School of Engineering, Tohoku University
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Tanaka Shuji
Department Of Information Electronics Faculty Of Engineering Fukuoka Institute Of Technology
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Ohno Takeo
Micro Nanomachining Research And Education Center Graduate School Of Engineering Tohoku University
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Tanaka Shuji
Department Of Electronics Faculty Of Engineering Fukuoka Institute Of Technology
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Tanaka Shuji
Department of Electronic Materials Engineering, Fukuoka Institute of Technology,
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TANAKA Shuji
Department of Chemistry, Faculty of Science, Kyushu University
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