Thermal Sensor Probe with a Si Resonator in a Cavity for Thermal Insulation

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概要

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• A thermal sensor probe with a Si resonator in a cavity for thermal insulation was designed and fabricated to measure a heat from fluidic samples in an atmosphere. The resonant thermal sensor was isolated in a cavity in a probe to decrease a vibration damping and a heat loss to surrounding environments, which increased the thermal sensitivity. The heat from the sample at the probe tip was conducted via a heat guide into the resonator in the cavity. Characteristics of the sensor probe were evaluated in terms of a quality factor, a temperature coefficient of the resonant frequency of the resonator, and a frequency stability. Its thermal resolution was 0.3 °C. The measurement of the D-glucose concentration in a droplet was demonstrated from its temperature changes. Our sensor probe could access specific samples on a two-dimensional space and has a feasibility to accomplish highly sensitive thermal measurements without any vacuum equipment.

• 2013-11-25

著者

• Ono Takahito

  Department Of Mechanical System And Design Graduate School Of Engineering Tohoku University

• Inomata Naoki

  Micro System Integration Center, Tohoku University, Sendai 980-0845, Japan

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• Thermal Sensor Probe with a Si Resonator in a Cavity for Thermal Insulation
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