713 高感度センシング用超薄シリコンカンチレバーのナノ機械特性に及ぼすガス吸着の影響(OS8-(3)オーガナイズドセッション《マイクロマシンとG-MEMS/N-MEMS》)

概要

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The differential bending between two identical cantilevers can be used to reduce the measurement error in various kinds of cantilever type sensors. Geometrically designed interdigitated fingers and a signal detection using optical interference are therefore proposed to further magnify the differential bending for sensing a very small amount of mass variation, due to some kind of molecule adsorption. As a preliminary study, this paper presents findings on nano-mechanical properties of ultra-thin single-crystal silicon (SCS) resonators, with emphasis on their surface effects, resulting from gas adsorption. The measured Q-factors were found to be very sensitive to the surface conditions. This implies that the surface-related mechanism, or adsorption-induced surface stress, should be considered to explain the observed behavior. The results obtained in this study provide an insight into the understanding of effects of gas adsorption on nano-mechanics of resonating elements.
2010-08-27