OS1-5 MEMS静圧軸受の高性能化(OS1 マイクロエネルギー変換,分散と集中の共存)

概要

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A new type of MEMS-based radial hydrostatic gas bearing for MEMS-based gas turbines was developed. In this radial bearing, gas inlet ports are formed on the journal, and several types of restriction such as orifice and slot restriction can be realized. To fabricate this radial bearing, novel "cavity-trough deep reactive ion etching (DRIE)" was developed. 80μm square inlet ports and 5μm wide slots were fabricated on a journal with 4mm diameter and 350μm length, and the features of cavity-though DRIE was investigated for more precise fabrication. Also, the direct bonding technology of silicon wafers with closed cavities at the bonding interface was developed. By inserting mechanical spacers between the wafers and then proceeding the bonding process in vacuum, the inside of the cavities at the bonding interface becomes vacuum. As a result, bonding failures caused by the expansion of air inside the cavities during annealing can be avoided. Voids at the bonding interface did not appear by an appropriate cleaning process of the mechanical spacers.
社団法人日本機械学会の論文
2006-06-28