OS1-07 超厚膜フォトレジストを用いたマイクロインペラの製作と小形空気ポンプへの応用(OS1 マイクロエネルギー変換)

概要

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We developed the technology to fabricate up-to-millimeter-sized plastic parts with microstructures inside using new low-stress ultrathick photoresist (XP SU-8 3000 series, Kayaku Microchem). Using this technology, a 2-dimensional shrouded impeller with a diameter of 10mm and a blade height of 320μm was fabricated. An alkaline-solvable sacrificial polymer layer was formed on a silicon substrate, and then the spin-deposition and exposure of the ultrathick photoresist were performed twice. After that, the exposed double layer was developed, making a basement (hub) and blades. On the blades, 6 sheets of XP SU 3000 dry film were thermally laminated on top, exposed, and then developed, making a shroud. Finally, the microimpeller was released from the silicon wafer by solving the sacrificial layer using alkaline solution. No clack or bend is found on the fabricated microimpeller, and the blade walls stand straight on the basement. This microimpeller is used for a miniature turbo pump supplying air to portable fuel cells.
社団法人日本機械学会の論文
2005-06-28