中低温動作マイクロSOFCのためのGd添加CeO_2の堆積と微細加工(水素・燃料電池,<特集>第13回動力・エネルギー技術シンポジウム)

概要

論文の詳細を見る
This paper describes the fabrication technology of micro solid oxide fuel cells (SOFC) using Gddoped CeO_2 (GDC) solid oxide electrolyte. A GDC membrane is made extremely thin (〜300nm thick) for low temperature operation, and a microheater is formed on the GDC membrane for local heating. To fabricate the self-supported GDC membrane, the stress of GDC films deposited by pulse laser deposition (PLD) was reduced by controlling partial O_2 pressure during deposition. The etch resistance of the GDC film against several chemicals was investigated to design the fabrication process of the micro SOFC. Using the designed fabrication process, the core structure of the micro SOFC was successfully fabricated. The ionic conductivity of the self-supported GDC membrane is approximately identical to that of bulk GDC. The area specific resistivity of the self-supported GDC membrane is as low as 0.15Ωcm^2 at 500℃.
2009-03-25