708 同期共振を利用した逆C型単結晶シリコン共振子 : 構造設計と作製(OS8-(2)オーガナイズドセッション《マイクロマシンとG-MEMS/N-MEMS》)

概要

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Synchronization of coupled system is a common phenomenon of nature. Its discovery dates back at least to the time of Christian Huygens, who remarked that two slightly out-of-step pendulum-like clocks become synchronized after they are attached to a same thin wooden board. In this study, two kinds of oscillation systems consisting of one opposite C type cantilever and another beam-shaped cantilever, with and without mechanical element to the support, have been proposed, respectively. The vibration modes, were simulated using a commercial Coventor Ware^<TM> software to guarantee the two resonant frequencies to mutually obey the relation of ω_1≒2ω_2, which are expected to be coupled through a coupling overhang. The synchronization of the fabricated oscillation systems will be further demonstrated and compared.
2010-08-27