T0302-2-1 静電駆動型disk振動子を用いたMEMS発振器(マイクロ・ナノ力学とシステム設計論(2))

概要

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Development of disk-type MEMS resonators has a great impact on the application in the wireless communication systems by providing the high quality factor and one-chip capability with the semiconductor ICs, due to a vibration type to reduce an air-damping effect and the utilization of the single-crystal or polycrystalline silicon for the structural material. Now, annular disk-type resonators have been researched for the purpose of realizing higher performance MEMS resonator. In this report, MEMS oscillators using this type disk resonator were developed. Oscillator performance and characteristics of circuit design were reported. Furthermore, Experimental results of water vapor adsorption test were presented for demonstrating mass sensing performance of MEMS oscillators using disk-type resonator.
社団法人日本機械学会の論文
2009-09-12