709 ディスク型振動子デバイスの作製とその静電容量ギャップ形状の改善(OS8-(2)オーガナイズドセッション《マイクロマシンとG-MEMS/N-MEMS》)

概要

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Disk-type resonators employing in-plane resonant modes provide high quality factor in air at atmospheric pressure. In this paper, we have fabricated single crystal silicon (SCS) disk-type micromechanical resonators of 200-μm diameter with 150-nm-wide vertical transducer gaps. The gaps have been fabricated through a process including a single deep reactive ion etching (D-RIE) of SCS with a resist mask patterned by electron beam lithography. The resonant frequencies measured for the fabricated resonators agreed well with those predicted by finite element simulations. Furthermore, the D-RIE process conditions for the transducer gaps were improved. Using the improved D-RIE process conditions, less tapered gaps of 2μm deep were successfully fabricated.
一般社団法人日本機械学会の論文
2010-08-27