ガラス状炭素成形型のFIB加工とマイクロガラスレンズのモールド成形

概要

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To produce micro glass lens by mold-press, 3D micro lens die was fabricated on glass-like carbon (GC) by focused ion beam (FIB) etching. The dimensional accuracy and surface roughness, as well as transcriptional performance, were investigated. A precise and smooth die was completed by optimizing dwell time, current and step number of 2D bit map data, which agreed well with theoretical estimation. Micro glass lenses with different diameter and gradient angle were mold-pressed using the GC die. The diameter and sag were confirmed to be nearly equivalent to or just smaller than those of GC die.
社団法人精密工学会の論文
2006-06-05