714 消費電力モニタリング用MEMS直流電力センサの開発(OS8-(3)オーガナイズドセッション《マイクロマシンとG-MEMS/N-MEMS》)

概要

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The reduction of CO_2 in residential and commercial environments is a highly critical task for suppression of global warming. Since 40 % of the total amount of CO_2 exhaust above is the electric power consumption, the R&D of universal-type sensors to monitor electricity usage to improve energy efficiency is of extreme importance. This work however, presents a novel MEMS DC sensor to satisfy the increasing needs for DC power supply with lower transmission loss in future residential and commercial environments. Analytical models are further developed to predict the output voltage and the sensitivity of piezoelectric thin films for guiding the design of a sensor prototype integrated with a permanent magnet. The results show that both the output voltage and the sensitivity of PZT are two times higher than those of AlN.
一般社団法人日本機械学会の論文
2010-08-27