M2-3 単軸引張試験による単結晶シリコンの機械的特性の結晶異方性評価(M2 材料評価)

概要

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In this paper, we report on the uniaxial tensile tests of single crystal silicon (SCS) specimens having three different crystallographic orientations such as <100>, <110>, and <111> in loading axes, to evaluate the crystal anisotropy of the mechanical properties. The specimens were fabricated on the same (110) silicon on insulator (S0I) wafer. The test parts were 10 μm wide, 5 μm thick, and 120 μm long, and they have 1 μm-depth notch at the center. The fracture force of <100>, <110>, and <111> specimens are 50.2 mN, 52.6 mN, and 48.4 mN, respectively.
2009-10-15