5507 電磁式天秤を用いたマイクロ構造のバネ定数測定(J19-2 マイクロメカトロニクス(2),J19 マイクロメカトロニクス)

概要

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The spring constant of a folded beam structure was directly measured for the calibration of the force-displacement transferring spring in the MEMS tensile testing device for nanoscale materials. The force that can be applied to the spring is up to 100μN, so Thin film tensile tester using electromagnetic balance was adopted. First, we improved the force-measurement resolution of the tensile tester through the review of the stability of the control system, the test environment, the noise in the control current, and the set-up of the testing system. Second, we measured the spring constant with a device containing four folded beams. The spring beams were 2μm width, 5μm thick, and 216μm and 285μm long, whose spring constant are designed to be 0.3N/m and 0.7N/m respectively. The measured values were 0.18N/m and 0.57N/m, which were distinct from the designed values, but close to the modified analytical value in which actual cross section areas were considered.
社団法人日本機械学会の論文
2006-09-15