感光性エポキシ樹脂をエッチングマスクとして用いる電気泳動マイクロチャンネルチップの作製 (<特集>ダウンサイズ化する分析化学)

概要

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In this paper, we present a new fabrication method that uses a UV-sensitive epoxy resin as an etching mask for a micro-channel electrophoresis chip. We have used it to separate fluorescein and fiuorescein-5-sulfonic acid. The device was fabricated in a 50 mm square of soda glass by using micro-lithographic patterning and wet etching techniques. The proposed method does not need for plating and etching of Au/Cr masks. An etched bottom plate was covered with a top plate drilled access holes into it and permanently bonded in an oven by heating at 560 580℃. The chip had a separation channel and a sample injection channel. The separation channel was 80 μm wide and 20 μm deep. Using a micro-fabricated chip with a separation length of 10 mm and a separation voltage of 800 V, the electrophoresis of a fluorescein and fiuorescein-5-sulfonic acid mixture gave two well-separated peaks. Detection was achieved using a laser-induced fluorescence microscope. The HETP of this chip was 3〜4 tim for fluorescence samples, and a separation coefficient of 2.2 was realized. The proposed fabrication method is very simple and easy, and has given separation and detection results for fluorescein derivatives.
社団法人日本分析化学会の論文
2000-12-05