2121 任意基板への微小要素の集積化のためのマニピュレーションシステム(要旨講演,一般セッション:マイクロナノメカトロニクス)

概要

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We developed, for the first time, the manipulation system based on optoelectronic tweezers (OET) which manipulates multiple nano/micro components on an arbitrary substrate with concurrent observation of the component motion. It uses CdS as a photoconductive film. Since CdS transmits red light and absorbs blue light, red light is utilized for the observation and blue light is utilized for the manipulation. The photoconductive electrode substrate which generates the nonuniform electric field for the component manipulation using dielectrophoresis consists of CdS on comb ITO electrode. Using the substrate, it was successfully demonstrated to manipulate a silica particle. Light projected CdS/ITO area had the higher electric field and repelled silica particle. By appling 10 V at 100 kHz, manipulation force of 0.6 pN was induced and manipulated silica particle speed was about 7 μm/s.
社団法人日本機械学会の論文
2008-03-17