432 単結晶シリコンの曲げ試験における結晶異方性の効果(T09-2 微小機械システムにおけるマイクロ・ナノ力学(2) 単結晶シリコンの力学特性,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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Single crystal silicon has a complicated anisotropic elasticity specific to single crystal materials. We have evaluated fatigue characteristics of micromachined single-crystal silicon using resonator devices with two crystallographic configurations. The fatigue strength of the <100>-oriented test piece showed about 1.5 times higher value compared with that of <110>-oriented one. The difference was analyzed using finite element stress calculations including proper crystal anisotropy effect. A stress relaxation effect by the elastic anisotropy was shown on the rounded notch structure. Moreover, the difference in the fatigue strength implied the importance of anisotropic fracture characteristics in single crystal.
2008-08-02