2837 高温薄膜引張試験装置の開発(S08-3 微小機械設計・開発のための実験力学の新展開(3),S08 微小機械設計・開発のための実験力学の新展開)

概要

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This paper reports on the development of a new tensile tester operable at 800℃ using infrared heating system for evaluating mechanical properties of thin films at high temperature. Single crystal silicon films of 3μm thick were tested at 600℃. At room temperature, the fracture strength and Young's modulus were 3.33GPa and 163.2GPa, respectively. At 600℃, they were 2.71GPa and 151.8GPa, respectively. When the strain rate was decreased, the stress and stage displacement curves had yield points and the fractured specimens exhibited the slip lines at 600℃.
一般社団法人日本機械学会の論文
2007-09-07