2201 X線二重露光法における加工パラメータ決定手法の提案とその検証(要旨講演,マイクロナノ理工学)

概要

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This paper presents a new analytical method to determine process parameters on Double exposure Deep X-Ray Lithography (D^2XRL). D^2XRL is a unique and promising technique for 3D micro fabrication among other techniques. As an example, it was demonstrated that a micro-needle array with the very sharp tip is easily and successfully fabricated without any special apparatuses and difficult process control. The advantage of the newly proposed analytical method is that an effective relationship between required shape and process parameters are derived directly from equations. It was successfully demonstrated that the process parameters to fabricate a micro-needle with specific "height" and "tip angle" was possible to be determined by proposed analytical method.
社団法人日本機械学会の論文
2005-03-21