T0302-2-2 変断面両端固定梁を有する静電駆動MEMS共振器の簡易設計手法の構築(マイクロ・ナノ力学とシステム設計論(2))

概要

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This research carried out a semi-empirical analysis of the resonant frequency for fixed-fixed beam oscillators having a non-uniform rectangular cross section, in order to develop a simple and accurate design rule of electrostatic driving MEMS resonators. Finite element analyses (FEA) revealed that the resonant frequency of the oscillators nonlinearly changed from 7 MHz to 17 MHz with an increase of the width of cross section. However, the frequency estimated by Rayleigh-Ritz theory showed the two times value of FEA. This is because the classical theory does not include the notch effect on the bending stiffness, attributed to the non-uniform cross section. This study newly proposed a analytical formula including the notch effect, and then succeeded in estimating the resonant frequency for the oscillator by fitting the formula into FEA. The analytical formula was also able to predict the transmission factor using the equivalent circuit model.
社団法人日本機械学会の論文
2009-09-12