426 MHz帯域RF-MEMS共振器の設計開発(T09-1 微小機械システムにおけるマイクロ・ナノ力学(1) MEMSにおけるマイクロ・ナノ力学,大会テーマセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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This paper describes the design, fabrication and measurement of an electrostatic RF-MEMS resonator with a resonant frequency in an MHz range. In the design, the Duffing equation was applied to a vibration model of a mechanical oscillator, for precisely analyzing its vibration characteristic. Electromechanical coupling provided us with an equivalent circuit of the MEMS resonator vibrating the oscillator, which enables to analyze the impedance of the resonator. In the fabrication, sub-micron gaps between the oscillator and two electrodes were created by combining focused ion beam (FIB) sputtering with deep reactive ion etching (Deep-RIE), for decreasing a driving voltage and increasing a detection capacitance. We have, so far, succeeded in fabricating the RF-MEMS resonator with a micro-mechanical oscillator and the gaps of 600 nm in width, and measuring the resonant frequency in an MHz range.
社団法人日本機械学会の論文
2008-08-02