2832 非対称四点曲げ試験法によるマイクロSi構造体のせん断強度評価(S08-2 微小機械設計・開発のための実験力学の新展開(2),S08 微小機械設計・開発のための実験力学の新展開)

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This paper proposes a novel shear testing technique for MEMS materials based on an Asymmetrical Four-Point Bending (AFPB) method This research has newly developed a shear tester and a AFPB test specimen that are able to apply pure shear stress loading to a micro single crystal silicon (SCS) specimen with "U" and "V" shaped notches, in order to estimate shear strength and fracture toughness. Consequently, we have succeeded in evaluating the shear strength and shear strain of SCS on a micro scale. Shear modules of SCS averaged 58.7GPa, which is close to theoretical value in [112] direction on (110) plane of SCS. The fracture toughness was 3.6 to 4.5 MPa√m. The shear strength was 0.6 to 2.1GPa in average. The crack initiated on the slip plane at the bottom of notches, whereas it propagated perpendicularly to the maximum principal stress direction dominated by mode II predicted by FEM.
一般社団法人日本機械学会の論文
2007-09-07