マイクロ引張試験チップによるカーボンナノワイヤの機械・電気特性評価に関する研究(S05-1 ナノ・マイクロ材料の強度評価,S05 薄膜の強度物性と信頼性)

概要

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This paper reports new development of a tensile testing device driven by electrostatic actuator array for revealing mechanical and electrical properties of carbon nanowires used for nanomechanical sensors. The design concept of tensile testing device, are presented, which is composed of three elements; a carbon nanowire, electrostatic actuator array for applying uniaxial load to the nanowire and a cantilever for calibrating load and displacement. The fabrication process of the device using an SOI wafer is also established for high-accuracy arrangement of the nanowire on the testing device with the actuator array. The uniaxial tensile testing was demonstrated in order to obtain the force-displacement relation of the carbon nanowires.
2004-09-04