MNM-P11-3 自己変位検出型静電櫛歯等価回路を用いた振動型ジャイロの動作解析(P11 電気等価回路から考えるMEMS設計手法)

概要

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This paper reports transient analysis in self-induced oscillation of vibrating gyroscope by using the novel electrical equivalent circuit of electrostatic comb transducer. The equivalent circuit with built-in displacement detection can analyze dc operating points which depends on external parameters like springs, bias voltage and force. By using the proposed equivalent circuit, we estimated the bias voltage dependency of oscillation risetime and voltage amplitude. By comparing the analysis and measurement of start-up response of SOG (silicon-on-glass) gyroscope, we showed the proposed equivalent circuit facilitate designing and estimate gyroscope performance.
一般社団法人日本機械学会の論文
2010-10-12