Hydrogen-Controlled Crystallinity of 3C-SiC Film on Si(001) Grown with Monomethylsilane

スポンサーリンク

概要

著者

関連論文

Real-time monitoring of initial oxidation of Si(110)-16×2 surface by Si 2p Photoemission spectroscopy
Real-time monitoring of initial oxidation of Si(110)-16×2 surface by Si 2p Photoemission spectroscopy
Real-Time Observation of Initial Thermal Oxidation on Si(110)-16×2 Surfaces by O1s Photoemission Spectroscopy Using Synchrotron Radiation
Clinical effect of orengedokuto for patients with climacteric disorder : Comparison with symptoms in kamishoyosan-responders
Hydrogen-Radical-Assisted Chemical Vapor Deposition of SiN Films Using Si(CH_3)_4 and NH_2CH_3
Chemical Vapor Deposition of Low Hydrogen Content Silicon Nitride Films Using Microwave-Excited Hydrogen Radicals
Evaluation of the Voltage Down Converter(VDC)with Low Ratio of consuming Current to Load Current in DC/AC Operation Mode
Sitzball 着座時の覚醒水準変動
Real-time observation of initial thermal oxidation on Si(110)-16×2 surfaces by O 1s photoemission spectroscopy using synchrotron radiation (Special issue: Solid state devices and materials)
Hydrogen-Controlled Crystallinity of 3C-SiC Film on Si(001) Grown with Monomethylsilane
Scanning-Tunneling Microscopy Observation of Monomethylsilane Adsorption on Si(111)-7×7
Ge-Dot Formation on Si(111)-7 × 7 Surface with C Predeposition Using Monomethylsilane
P3-39 Effect of Interface states at SiO_2/Si boundaries on Surface Photovoltage and Piezoelectric Photothermal Spectra(Poster session 3)
(100)-Oriented 3C-SiC Polycrystalline Film Grown on SiO_2 by Hot-Mesh Chemical Vapor Deposition Using Monomethylsilane and Hydrogen
Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
Nucleation of Oxides during Dry Oxidation of Si(001)-2 × 1 Studied by Scanning Tunneling Microscopy
Empirical Potential Approach to the Formation of 3C-SiC/Si(110)
High-Performance Buried-Gate Surrounding Gate Transistor for Future Three-Dimensional Devices
An Analysis of Program and Erase Mechanisms for Floating Channel Type Surrounding Gate Transistor Flash Memory Cells(Semiconductor Materials and Devices)
New Three-Dimensional High-Density Stacked-Surrounding Gate Transistor (S-SGT) Flash Memory Architecture Using Self-Aligned Interconnection Fabrication Technology without Photolithography Process for Tera-Bits and Beyond
Buried Gate Type SGT Flash Memory(The IEICE Transactions (published in Japanese) Vol. J86-C, No.5 (Electronics))
Influence of Silicon Wafer Loading Ambient on Chemical Composition and Thickness Uniformity of Sub-5-nm-Thick Oxide Films : Surfaces, Interfaces, and Films
The Analysis of the Stacked-Surrounding Gate Transistor(S-SGT)DRAM for the High Speed and Low Voltage Operation
New Write/Erase Operation Technology for Flash EEPROM Cells to Improve the Read Disturb Characteristics
New Reduction Mechanism of the Stress Leakage Current Based on the Deactivation of Step Tunneling Sites for Thin Oxide Films
An Analytic Steady-State Current-Voltage Characteristics of Short Channel Fully-Depleted Surrounding Gate Transistor (FD-SGT) (Special Issue on New Concept Device and Novel Architecture LSIs)
An Accurate Model of Fully-Depleted Surrounding Gate Transistor (FD-SGT) (Special Issue on New Concept Device and Novel Architecture LSIs)
New Electron-Doped Superconducting Cuprate Li_xSr_2CuO_2Br_2
Familial Isolated Hyperparathyroidism Caused by Single Adenoma: A Distinct Entity Different from Multiple Endocrine Neoplasia
Binding kinetics of ^C-N-methyl piperidyl benzilate (^C-NMPB) in a rhesus monkey brain using the cerebellum as a reference region
Effects of anesthesia upon ^F-FDG uptake in rhesus monkey brains
A case of sleep choking syndrome improved by the Kampo extract of Hange-koboku-to
Evaluation of the Correspondence between Carbon Incorporation and the Development of c(4×4) Domains
Improvement in Crystallinity of ZnO Films Prepared by rf Magnetron Sputtering with Grid Electrode
521 Stiffness Indices for the Performance Evaluation of H4 Parallel Robot
Structure of Microcrystalline Silicon Carbide Films Prepared by Hydrogen-Radical-Enhanced Chemical Vapor Deposition in Magnetic Field ( Plasma Processing)
Extensive Control of Plasma Parameters in the Afterglow Region of Electron-Cyclotron-Resonance Plasma for the Epitaxial Growth of Cubic Gallium Nitride
MoO_2 Hollow Fiber with Rectangular Cross Sections
Undermining necrosis in pressure sore will extend with oblique load : mechanical analysis using finite element model
Physical Origin of Stress-Induced Leakage Currents in Ultra-Thin Silicon Dioxide Films(Ultra-Thin Gate Insulators,Fundamentals and Applications of Advanced Semiconductor Devices)
Study of 30-nm Double-Gate MOSFET with Halo Implantation Technology Using a Two-Dimensional Device Simulator(Novel MOSFET Structures,Fundamentals and Applications of Advanced Semiconductor Devices)
Thin-Film Deposition of Silicon-Incorporated Diamond-Like Carbon by Plasma-Enhanced Chemical Vapor Deposition Using Monomethylsilane as a Silicon Source
Study of Self-Heating in Si Nano Structure for Floating Body-Surround Gate Transistor with High-$k$ Dielectric Films
Scanning-Tunneling Microscopy Observation of Monomethylsilane Adsorption on Si(111)-$7{\times}7$
New Three-Dimensional High-Density Stacked-Surrounding Gate Transistor (S-SGT) Flash Memory Architecture Using Self-Aligned Interconnection Fabrication Technology without Photolithography Process for Tera-Bits and Beyond

もっと見る

スポンサーリンク