Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-03-15
著者
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TAKATA Masasuke
Department of Electrical Engineering, Nagaoka University of Technology
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YASUI Kanji
Department of Electronics, Faculty of Engineering, Nagaoka University of Technology
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Narita Yuzuru
Department Of Electrical Electronic And Information Engineering Nagaoka University Of Technology
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AKAHANE Tadashi
Department of Electrical Engineering, Nagaoka University of Technology
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ETO Jyunpei
Department of Electrical, Electronic and Information Engineering, Nagaoka University of Technology
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Akahane T
Department Of Electrical Engineering Faculty Of Engineering Nagaoka University Of Technology
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Akahane T
Faculty Of Engineering Nagaoka University Of Technology
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