Extensive Control of Plasma Parameters in the Afterglow Region of Electron-Cyclotron-Resonance Plasma for the Epitaxial Growth of Cubic Gallium Nitride
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
-
YASUI Kanji
Department of Electronics, Faculty of Engineering, Nagaoka University of Technology
-
AKAHANE Tadashi
Department of Electrical Engineering, Nagaoka University of Technology
-
Yasui Kanji
Department Of Electrical Engineering Nagaoka University Of Technology
-
Akahane Tadashi
Department Of Electrical Engineering Faculty Of Engineering Nagaoka University Of Technology
-
Akahane Tadashi
Department Of Electrical Engineering Nagaoka University Of Technology
-
Kikuchi Masaaki
Department of Electrical Engineering, Nagaoka University of Technology
-
Uwabachi Atsushi
Department of Electrical Engineering, Nagaoka University of Technology
-
Kikuchi M
Department Of Electrical Engineering Nagaoka University Of Technology
-
Akahane Tadashi
Deparment Of Electrical Engineering Faculty Of Engineering The Technological University Of Nagaoka
-
Uwabachi Atsushi
Department Of Electrical Engineering Nagaoka University Of Technology
-
Uwabachi Atushi
Department of Electrical Engineering, Nagaoka University of Technology
-
Kikuchi Masaaki
Department of Electrical Engineering, Nagaoka University of
関連論文
- Determination of the Anisotropic Refractive Indices of Twisted Nematic Liquid Crystals by Means of Renormalized Transmission Ellipsometry : Instrumentation, Measurement, and Fabrication Technology
- Hydrogen-Radical-Assisted Chemical Vapor Deposition of SiN Films Using Si(CH_3)_4 and NH_2CH_3
- Chemical Vapor Deposition of Low Hydrogen Content Silicon Nitride Films Using Microwave-Excited Hydrogen Radicals
- Hydrogen-Controlled Crystallinity of 3C-SiC Film on Si(001) Grown with Monomethylsilane
- (100)-Oriented 3C-SiC Polycrystalline Film Grown on SiO_2 by Hot-Mesh Chemical Vapor Deposition Using Monomethylsilane and Hydrogen
- Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
- Determination of Film Thickness and Anisotropy of the Refractive Indices in 4-octyl-4'-cyanobiphenyl Liquid Crystalline Free-Standing Films
- Influence of Deformation of Smectic Layer Structure on Dielectric Behavior of Ferroelectric Liquid Crystal
- Relationship between Surface Order and Surface Azimuthal Anchoring Strength on Polyimide with Linearly Polarized Ultraviolet Light Exposure
- Offset of Multiple-Beam Interference inside Anisotropic Multilayered Structure : Determination of Polar Anchoring Strength at Nematic Liquid Crystal-Wall Interface
- Optical Compensation Method for In-plane Switching Twisted Nematic Mode
- Determination of Polar Anchoring Strength at Vertical Alignment Nematic Liquid Crystal-Wall Interface Using Thin Hybrid Alignment Nematic Cell
- Amorphous In-Plane Switching Twisted Nematic Liquid Crystal Displays Fabricated without Rubbing Process Show a Wide Viewing Angle and Fast Response Characteristics
- Electro-Optical Properties of the In-Plane Switching Twisted Nematic Mode
- Novel Measurement Method for Flexoelectric Coefficients of Nematic Liquid Crystals
- Determination of Director Profile of Twisted Nematic Liquid Crystal Cell with Tilted Surface Alignment by Renormalized Transmission Ellipsometry
- Surface Azimuthal Anchoring Energy between the Grating Surface and Nematic Liquid Crystal Layer Studied by Finite Element Method
- Measurement of Genuine Azimuthal Anchoring Energy in Consideration of Liquid Crystal Molecular Adsorption on Alignment Film
- Quantitative Analysis of Nematic Director Reorientation Dynamics Studied by Time-Resolved Spectroscopic Ellipsometry
- Dynamics of Surface-Stabilized Ferroelectric Liquid Crystals at the Alignment Layer Surface Studied by Total-Reflection Ellipsometry : Structure and Mechanical and Thermal Properties of Condensed Matter
- Analysis of Totally Reflected Light from Liquid Crystal Cell using Renormalized Ellipsometry
- Dynamic Response of Surface-Stabilized Ferroelectric Liquid Crystals : Effect of Alignment Films
- Electrooptical Properties of Vertically Aligned Twisted Nematic Cells with Negative Dielectric Anisotropy
- Renormalized Ellipsometry for Determining the Anisotropic Refractive Indices of Nematic Liquid Crystals
- Optical Properties of 4-Octyl-4'-Cyanobiphenyl Liquid-Crystalline Free-Standing Films
- Transmission Ellipsometry of 4-Octyl-4'-Cyanobiphenyl Liquid-Crystalline Free-Standing Films
- Observation of Nematic Liquid Crystal Director Reorientation at the Interface between Substrate and Liquid Crystal Layer by Total Reflection Ellipsometry
- Analysis of Liquid Crystal Orientation at Interface between Liquid Crystal and Alignment Film by Total Reflection Ellipsometry
- Polar Anchoring Effect on Bistable Nematic Liquid Crystal Display
- Evaluation of the Correspondence between Carbon Incorporation and the Development of c(4×4) Domains
- Improvement in Crystallinity of ZnO Films Prepared by rf Magnetron Sputtering with Grid Electrode
- Investigation of Antiferroelectric Liquid Crystalline Free-Standing Films by Transmission Ellipsometry
- A Consideration on Expression of the Elastic Free Energy of Chiral Smectic C Liquid Crystals
- A Study of the Anomalous Transmission (Borrmann Effect) for Obliquely Incident Light in an Absorbing Single-Domain Cholesterie Liquid Crystal
- Measurement of Elastic Constant and Intrinsic Twist of Ferroelectric SmC^* Liquid Crystal
- Temperature Dependence of Selective Reflection in Ferroelectric SmC^* Liquid Crystal : Condensed Matter
- Dispersion Relation of Optical Eigen Modes in Ferroelectric SmC^* Distorted by an Electric Field
- Structure of Microcrystalline Silicon Carbide Films Prepared by Hydrogen-Radical-Enhanced Chemical Vapor Deposition in Magnetic Field ( Plasma Processing)
- Extensive Control of Plasma Parameters in the Afterglow Region of Electron-Cyclotron-Resonance Plasma for the Epitaxial Growth of Cubic Gallium Nitride
- Field-Induced Biaxiality in SmA Phase of a Liquid Crystal Exhibiting Electroclinic Effect
- Effect of Polarization Field on Elastic Deformation in a 180° Twisted Sample of Chiral Smectic C Liquid Crystal
- Chevron Layer Structure and Focal Conics in Chiral Smectic C Liquid-Crystal Cells Aligned by SiO Oblique Evaporation Technique
- Nematic Director Reorientation Dynamics Studied by Time-Resolved Fourier-Transform Infrared Spectroscopy
- Evaluation of Alignment of Nematic Liquid Crystal Thin Film by Spectroscopic Ellipsometry
- Study of Liquid Crystal Alignment Formed Using Slit Coater
- Determination of Polar Anchoring Strength for Polymer-Stabilized Blue Phase Liquid Crystal Device
- Preparation of Microcrystalline Silicon Carbide Films by Hydrogen-Radical-Enhanced Chemical Vapor Deposition Using Tetramethylsilane
- Dynamic Responses of Ferroelectric Liquid Crystals in the Surface-Stabilized Geometry I : Condensed matter
- Dynamic Response of Surface-Stabilized Ferroelectric Liquid Crystals with Chevron Layer Structure
- Layer Structure Reformation of Surface-Stabilized Ferroelectric Liquid Crystal Treated with Electric Field
- Novel Method of Measuring Surface Torsional Anchoring Strength of Nematic Liquid Crystals
- Measurement of Refractive Indices of Ferroelectric SmC^* Liquid Crystal by the Fabry-Perot Interference Method
- Quantitative Analysis of Nematic Director Reorientation Dynamics Studied by Time-Resolved Spectroscopic Ellipsometry
- Analysis of Totally Reflected Light from Liquid Crystal Cell using Renormalized Ellipsometry
- Heat Pulse Method for Determination of Thermal Diffusivity of Liquid Crystals
- Focal Conic Structures in Homogeneously Aligned Chiral Smectic C Liquid-Crystal Cells
- A Molecular Statistical Theory of Smectic A Liquid Crystals
- A Molecular Field Treatment of Nematic Liquid Crystalline Mixtures.II.Calculations of Nematic-Isotropic Transition Temperatures for Binary Systems with 4,4-Di-n-alkoxyazoxybenzenes
- A Molecular Statistical Theory of Smectic A Liquid Crystalline Mixtures:Thermal Stability of Smectic A Phase in Binary Mixtures
- A Study of Homogeneous-Twist Transitions in Surface Stabilized Ferroelectric Liquid Crystal Cells
- Lattice Model Studies of Nematic Liquid Crystalline Mixtures:Effects of Molecular Flexibility
- A Molecular Field Theory of Lipid Systems
- Optical Properties of 4-Octyl-4$'$-Cyanobiphenyl Liquid-Crystalline Free-Standing Films
- A New Type of Electrohydrodynamic Instability in Nematic Liquid Crystals with Positive Dielectric Anisotropy.II.Theoretical Treatment
- A Molecular Statistical Theory of Antiferroelectric Smectic A Liquid Crystals
- A Molecular Field Treatment of Nematic Liquid Crystalline Mixtures:Effects of the Intermolecular Requlsions on Nematic-Isotropic Phase Transition in Binary Mixtures
- (100)-Oriented 3C–SiC Polycrystalline Film Grown on SiO2 by Hot-Mesh Chemical Vapor Deposition Using Monomethylsilane and Hydrogen
- Transmission Ellipsometry of 4-Octyl-4$'$-Cyanobiphenyl Liquid-Crystalline Free-Standing Films
- Effects of Spatial Dispersion on the Wave Propagation in the Magnetoplasma of Semimetals
- Evaluation of the Correspondence between Carbon Incorporation and the Development of c($4\times 4$) Domains
- Characterization of Bistable Hybrid-Twisted Nematic Liquid Crystal Mode by Means of Renormalized Transmission Spectroscopic Ellipsometry
- Dynamics of Surface-Stabilized Ferroelectric Liquid Crystals at the Alignment Layer Surface Studied by Total-Reflection Ellipsometry : Structure and Mechanical and Thermal Properties of Condensed Matter
- A New Type of Electrohydrodynamic Instability in Nematic Liquid Crystals with Positive Dielectric Anisotropy.I.The Existence of the Charge Injection and the Diffusion Current
- Improvement in Crystallinity of ZnO Films Prepared by rf Magnetron Sputtering with Grid Electrode
- Surface Azimuthal Anchoring Energy between the Grating Surface and Nematic Liquid Crystal Layer Studied by Finite Element Method
- Determination of Polar Anchoring Strength at Vertical Alignment Nematic Liquid Crystal-Wall Interface Using Thin Hybrid Alignment Nematic Cell
- Optical Compensation Method for In-plane Switching Twisted Nematic Mode
- Viewing Angle Characteristics and Cell Gap Tolerance of the In-plane Switching Twisted Nematic Mode
- Amorphous In-Plane Switching Twisted Nematic Liquid Crystal Displays Fabricated without Rubbing Process Show a Wide Viewing Angle and Fast Response Characteristics
- Electro-Optical Properties of the In-Plane Switching Twisted Nematic Mode
- Measurement of Genuine Azimuthal Anchoring Energy in Consideration of Liquid Crystal Molecular Adsorption on Alignment Film
- Determination of Director Profile of Twisted Nematic Liquid Crystal Cell with Tilted Surface Alignment by Renormalized Transmission Ellipsometry
- Offset of Multiple-Beam Interference inside Anisotropic Multilayered Structure: Determination of Polar Anchoring Strength at Nematic Liquid Crystal-Wall Interface
- Evaluation of Polar Anchoring Energy Based on Symmetric Oblique Incident Transmission Ellipsometry Method: the Voltage Diminution by Alignment Films
- Study of Liquid Crystal Display Fabricated Using Slit Coater under Two Ultraviolet Irradiation Conditions
- Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
- Characterization of Liquid Crystal Layer and Cholesteric Film by Renormalized Spectroscopic Ellipsometry
- Effect of Plasma Parameter Control on the Growth of Zincblende Type GaN Films by ECR Plasma Enhanced Metalorganic Chemical Vapor Deposition
- A Method for Determination of Elastic Constants $K_{1}$, $K_{2}$, $K_{3}$ of a Nematic Liquid Crystal Only Using a Homogeneously Aligned Cell
- Growth of Amorphous SiN Films by Chemical Vapor Deposition Using Monomethylamine
- Study of Liquid Crystal Display Fabricated Using Slit Coater under Two Ultraviolet Irradiation Conditions (Special Issue : Printed Electronics)
- Renormalized Ellipsometry for Determining the Anisotropic Refractive Indices of Nematic Liquid Crystals
- Electrooptical Properties of Vertically Aligned Twisted Nematic Cells with Negative Dielectric Anisotropy
- Extensive Control of Plasma Parameters in the Afterglow Region of Electron-Cyclotron-Resonance Plasma for the Epitaxial Growth of Cubic Gallium Nitride