A Novel and Highly Sensitive Gas Flow Sensor Using a Blot Spot on YBa_2Cu_3O_<7-δ> Thin Films

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概要

• 論文の詳細を見る

• A novel and highly sensitive hot-wire-type flow sensor constructed of a YBa_2Cu_3O_<7-δ> thin film has been fabricated. When heating voltage was applied to the sensor, a hot spot appeared and the sensor had a high sensitivity to air flow speeds of 0.04-4 m/s. Sensing characteristics have been examined for two different heating modes, constant-voltage and constant-resistance. In the constant-voltage mode, the current was proportional to the square root of the flow speed. In the constant-resistance mode, the output voltage was proportional to the fourth root of the flow speed, as is explained by the well-known King's law. In both cases, high sensitivity and good linearity were observed.

• 社団法人応用物理学会の論文
• 1995-10-01

著者

• TAKATA Masasuke

  Department of Electrical Engineering, Nagaoka University of Technology

• Takata Masasuke

  Department Of Electrical Engineering Nagaoka University Of Technology

• Kikuchi Kei

  Frontier Technology Research Institute Tokyo Gas Co. Ltd.

• KANZAKI Motoi

  Frontier Technology Research Institute, Tokyo Gas Co., Ltd.

• NEDA Tokudai

  Frontier Technology Research Institute, Tokyo Gas Co., Ltd.

• KONDO Takehiko

  Frontier Technology Research Institute, Tokyo Gas Co., Ltd.

• Neda Tokudai

  Frontier Technology Research Institute Tokyo Gas Co. Ltd.

• Kanzaki Motoi

  Frontier Technology Research Institute Tokyo Gas Co. Ltd.

• Kondo Takehiko

  Frontier Technology Research Institute Tokyo Gas Co. Ltd.

• Takata Masasuke

  Department Of Electrical Engineering Nagoya University Of Technology

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