Dependency of Adhesion Behavior on Thermtal Stress Distribution in Photoresist Micropatterns

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-02-15

著者

• Takata M

  Nagaoka Univ. Technology Niigata

• TAKATA Masasuke

  Department of Electrical Engineering, Nagaoka University of Technology

• KAWAI Akira

  LSI Laboratory, Mitsubishi Electric Corporation

• Takata Masasuke

  Department Of Electrical Engineering Nagaoka University Of Technology

• Nagata H

  Sci. Univ. Tokyo Chiba‐ken Jpn

• NAGATA Hitosi

  LSI Laboratory, Mitsubishi Electric Corporation

• Nagata Hitosi

  Lsi Laboratory Mitsubishi Electric Corporation

• Takata M

  Osaka Univ. Osaka Jpn

• Kawai Akira

  Lsi Laboratory Mitsubishi Electric Corporation

関連論文

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• Characterization of Surface Energetic Behavior by Atomic Force Microscopy
• Adhesion of Photoresist Micropattern to Aluminum Substrate in Alkaline Aqueous Solution
• Dependence of Offset Error on Overlay Mark Structures in Overlay Measurement
• Adhesion between Photoresist and Inorganic Substrate : Resist Material and Process
• Adhesion between Photoresist and Inorganic Substrate
• Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
• Sub-0.1 μm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography
• Preparation of Y-Cu-O/Ba-Co-O Multilayered Thin Films and Thermal Diffusion Behavior of the Interface
• Heteroepitaxial Growth of CeO_2 (001) Films on Si(001) Substrates by Pulsed Laser Depostion in Ultrahigh Vacuum
• In Situ RHEED Observation of CeO_2 Film Growth on Si by Laser Ablation Deposition in Ultrahigh-Vacuum
• Superconductivity in a New Oxide System of Eu-La-Ce-Cu-O
• Preparation of Superconducting Bi-Pb-Sr-Ca-Cu-O Glass Ceramics with T_=106 K
• Formation of the High-T_c Phase of Bi_Pb_xSr_Ca_Cu_O_y (0 ≦ x ≦ 0.05)
• Effect of Annealing on Superconductivity in Bi-Pb-Sr-Ca-Cu-O System
• Influence of Intermediate Pressing on Superconducting Characteristics in Bi-Pb-Sr-Ca-Cu-O System
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• Electron Diffraction and Microscopy of the Structures of La-Ba(Sr)-Cu Oxides at Liquid Helium Temperature
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• Preparation of High T_c Superconducting (La_Sr_x)_2CuO_4
• Electron Diffraction and Microscopy of the Structure of La-Ba(Sr)-Cu Oxides at Room Temperature
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