Adhesion of Photoresist Pattern Baked at 80 to 325℃ in Tetramethyl-ammonium-hydroxide Aqueous Solution
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-11-15
著者
-
Takata M
Nagaoka Univ. Technology Niigata
-
TAKATA Masasuke
Department of Electrical Engineering, Nagaoka University of Technology
-
KAWAI Akira
LSI Laboratory, Mitsubishi Electric Corporation
-
NAGATA Hitoshi
LSI Laboratory, Mitsubishi Electric Corporation
-
Takata Masasuke
Department Of Electrical Engineering Nagaoka University Of Technology
-
Nagata H
Sci. Univ. Tokyo Chiba‐ken Jpn
-
Nagata H
Osaka Prefecture Univ. Osaka Jpn
-
Takata M
Osaka Univ. Osaka Jpn
-
Kawai Akira
Lsi Laboratory Mitsubishi Electric Corporation
関連論文
- Shrinkage Effect of Local Area of Polymer Film on Adhesion Behavior
- Blister Formation at Photoresist-Substrate Interface
- Local Peeling of Photoresist Film during Ultraviolet Light Exposure
- Adhesion of Photoresist Pattern Baked at 80 to 325℃ to Inorganic Solid Surface
- Adhesion of Photoresist Pattern Baked at 80 to 325℃ in Tetramethyl-ammonium-hydroxide Aqueous Solution
- Characterization of Surface Energetic Behavior by Atomic Force Microscopy
- Adhesion of Photoresist Micropattern to Aluminum Substrate in Alkaline Aqueous Solution
- Dependence of Offset Error on Overlay Mark Structures in Overlay Measurement
- Adhesion between Photoresist and Inorganic Substrate : Resist Material and Process
- Adhesion between Photoresist and Inorganic Substrate
- Proposal of a Next-Generation Super Resolution Technique
- Photolithography System Using Modified Illumination
- Photolithography System Using a Combination of Modified Illumination and Phase Shift Mask
- Photolithography System Using Annular Illumination : Photolithography
- Photolithography System Using Annular Illumination
- Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
- Sub-0.1 μm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography
- Preparation of Y-Cu-O/Ba-Co-O Multilayered Thin Films and Thermal Diffusion Behavior of the Interface
- Heteroepitaxial Growth of CeO_2 (001) Films on Si(001) Substrates by Pulsed Laser Depostion in Ultrahigh Vacuum
- In Situ RHEED Observation of CeO_2 Film Growth on Si by Laser Ablation Deposition in Ultrahigh-Vacuum
- Superconductivity in a New Oxide System of Eu-La-Ce-Cu-O
- Preparation of Superconducting Bi-Pb-Sr-Ca-Cu-O Glass Ceramics with T_=106 K
- Formation of the High-T_c Phase of Bi_Pb_xSr_Ca_Cu_O_y (0 ≦ x ≦ 0.05)
- Effect of Annealing on Superconductivity in Bi-Pb-Sr-Ca-Cu-O System
- Influence of Intermediate Pressing on Superconducting Characteristics in Bi-Pb-Sr-Ca-Cu-O System
- Influence of Cooling Rate on Superconducting Characteristics of Bi-Pb-Sr-Ca-Cu-O Ceramics
- Superconducting Characteristics and Microstructure of Bi-Pb-Sr-Ca-Cu-O Ceramics : Electrical Properties of Condensed Matter
- Critical Current Density of Bi-Pb-Sr-Ca-Cu-O Superconducting Ceramics : Electrical Properties of Condensed Matter
- Growth and Characterization of Ferroelectric Pb(Zr, Ti)O_3 Films on Interface-Controlled CeO_2(111)/Si(111) Structures
- Analysis of Leading Edge/Trailing Edge Independent Detection Method in Optical Disk : High Density Recording
- Analysis of Leading Edge/Trailing Edge Independent Detection Method in Optical Disk
- Dependency of Adhesion Behavior on Thermtal Stress Distribution in Photoresist Micropatterns
- Effect of Anion in Developer on Dissolution Characteristics of Photoresist : Resist Material and Process
- Effect of Anion in Developer on Dissolution Characteristics of Photoresist
- Preparation of Compositionally Modulated Bi-Sr-Ca-Cu-O Multilayered Films by Plasma Controlled Sputtering : Electrical Properties of Condensed Matter
- Direct Observation of Helical Polysilane Nanostructures by Atomic Force Microscopy
- Room-Temperature Epitaxial Growth of CeO_2 Thin Films on Si(111) Substrates for Fabrication of Sharp Oxide/Silicon Interface
- Modulated Structure of the High-T_c Superconductor Bi-Pb-Ca-Sr-Cu-O Studied by High-Resolution Electron Microscopy and Electron Diffraction
- Processing and Superconducting Properties of GdBa_2Cu_3O_ Ceramics : Electrical Properties Condensed Matter
- Influence of Preparative Conditions on the Superconducting Characteristics in GdBa_2Cu_3O_ Ceramics : Electrical Properties of Condensed Matter
- Observation of GdBa_2Cu_3O_ Ceramic Microstructure : Electrical Properties of Condensed Matter
- Precise Mark Shape Control in Mark Length Recording on Magnetooptical Disk
- Read Channel and Format for High-Density Magneto-Optical Disk System
- Dependence of Magnetic Shielding Property on Critical Current Density
- Magnetic Shielding Propertiy of Bi(Pb)-Sr-Ca-Cu-O Superconducting Tube
- Yield Prediction Method Considering the Effect of Particles on Sub-Micron Patterning (Special Issue on Scientific ULSI Manufacturing Technology)
- High Resolution Electron Microscopy of Crystal and Defect Structures of the High-T_c Superconductor Ba_2YCu_3O_
- Electron Diffraction and Microscopy of the Structures of La-Ba(Sr)-Cu Oxides at Liquid Helium Temperature
- Rf Power Dependence of AC Josephson Current in Point-Contacts of BaY(Tm)CuO Ceramics
- AC Josephson Effect in Point-Contacts of Ba-Y-Cu-0 Ceramics
- Preparation of High T_c Superconducting (La_Sr_x)_2CuO_4
- Electron Diffraction and Microscopy of the Structure of La-Ba(Sr)-Cu Oxides at Room Temperature
- Critical Current Density and Microstructure of Superconducting YBa_2Cu_3O Films Prepared by a Tape Casting Method : Electrical Properties Condensed Matter
- Fabrication of Superconducting YBa_2Cu_3O_ Films by a Tape Casting Method
- Ultrashallow Junction Formation Using Low-Temperature Selective Si_Ge_x Chemical Vapor Deposition
- Fabrication of a Si_Ge_x Channel Metal-Oxide-Semiconductor Field-Effect Transistor (MOSFET) Containing High Ge Fraction Layer by Low-Pressure Chemical Vapor Deposition
- 2 GB/130 mm Capacity Direct-Overwrite Magneto-Optical Disk
- Epitaxial Growth of BaTiO_3 Thin Film on SrTiO_3 Substrate in Ultra High Vacuum without Introducing Oxidant : Surfaces, Interfaces, and Films
- Flattening Phenomenon Observed during Epitaxial Growth of BaTiO_3 by Alternating Deposition Method
- Reciprocation Characteristics of a Magnet Levitated above a YBa_2Cu_3O_x Superconductor
- Damping Characteristics of a Magnet Oscillating above a YBCO Superconductor
- Application of Domain Transfer to Magneto-optical Recording: Domain Stabilization during Readout
- Second Harmonic Generation from Si_Ge_x Epitaxial Films with a Vicinal Face:Film Thickness Dependence
- Optical Second Harmonic Generation in Si_Ge_x Film Epitaxially Grown on Si(100)
- On the Reactions of Quenched BaYCuO Powders with Various Materials : Electrical Properties of Condensed Matter
- Crystalline Phases in Superconductor Ba-Y-Cu-O with High T_c Prepared by Melting Method
- Liquid Quenched Superconductor Ba-Y-Cu-O with T_=88 K and AC Josephson Effect at 77 K
- A Novel and Highly Sensitive Gas Flow Sensor Using a Blot Spot on YBa_2Cu_3O_ Thin Films
- Evaluation of the Correspondence between Carbon Incorporation and the Development of c(4×4) Domains
- Improvement in Crystallinity of ZnO Films Prepared by rf Magnetron Sputtering with Grid Electrode
- Isothermal Capacitance Transient Spectroscopy in ZnO Varistor
- Superficial Aggravation of Sputter-deposited Bi-Sr-Ca-Cu-O Films by Annealing : Electrical Properties of Condensed Matter
- Correlation between Surface Free Energy and Dielectric Constant of BaTiO_3 Thin Film
- Electric Field Sensitive Moving Hot Spot in GdBa_2Cu_3O_ Ceramics
- Statistical Analysis of Dielectric Strength of BaTiO_3 Ceramic Films
- Formation of Superconducting Y-Ba-Cu-O Thin Films by the Solid Phase Reaction between BaCo_3/Cu/Y_2O_3 Layers on Single Crystalline SrTiO_3 Substrate
- HIPped High Density Bi-(Pb)-Sr-Ca-Cu-O Superconductors Produced without Any Additional Treatment
- Evaluation of the Correspondence between Carbon Incorporation and the Development of c($4\times 4$) Domains
- Improvement in Crystallinity of ZnO Films Prepared by rf Magnetron Sputtering with Grid Electrode
- Low-Temperature Heteroepitaxial Growth of SiC on (100) Si Using Hot-Mesh Chemical Vapor Deposition
- Interdiffusion of zinc ions in aluminium Cobalt(II) oxide and aluminium nickel(II) oxide.