E6 Periodic cylindrical nanostructure localization by means of affinity control in diblock copolymer microphase separation(Other manufacturing-related technologies)

概要

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Microphase separation of diblock copolymers is a known fabrication method for three-dimensional nanostructures. This study aims to establish position control of the vertical cylinder block by using poly(styrene-block-methyl methacrylate) (PS-b-PMMA). In order to realize localization control of nanostructures, we employed a surface treatment technique to control affinities for monomers. When intended areas on a substrate are treated with affinity for both monomers, it is expected to fabricate standing cylinder structures only on the areas. We investigate appropriate fabrication conditions, such as coating thickness, annealing temperature and processing time. We fabricate dot and line structures at positions at which surface treatment was performed on a substrate.
一般社団法人日本機械学会の論文
2009-12-01