Effects of Annealing on Material Characteristics of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition
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概要
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The effects of annealing on the material characteristics of a diamond-like carbon (DLC) thin film fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) were investigated. The elementary analysis, using Rutherford backscattering spectrometry and elastic recoil detection analysis, and measurement of hardness and Young’s modulus, using a nanoindentation technique, were performed on the FIB-CVD DLC thin film by annealing for 1 h in the temperature range from room temperature to 1273 K. Elementary analysis indicated that the Ga content in the FIB-CVD DLC film used as an ion source began to decrease considerably at 523 K and the H content also began to decrease at 773 K. On the other hand, the hardness and Young’s modulus of the FIB-CVD DLC film were found to decrease beyond 773 K. This decrease in hardness is ascribed to the variation in H content rather than in Ga content in the film.
- 2008-09-25
著者
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Saitoh Hidetoshi
Department Of Bioresource Science Obihiro University Of Agriculture And Veterinary Medicine
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Niihara Koichi
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Kanda Kazuhiro
University Of Hyogo Laboratory Of Advanced Science And Technology For Industry
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Kometani Reo
Graduate School Of Engineering The University Of Tokyo
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Suzuki Tsuneo
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Matsui Shinji
University Of Hyogo
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Kometani Reo
Graduate School of Engineering, The University of Tokyo, Tokyo 113-8658, Japan
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Igaki Jun-ya
University of Hyogo, Graduate School of Science, LASTI, Kamigori, Hyogo 678-1205, Japan
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Saikubo Akihiko
University of Hyogo, Graduate School of Science, LASTI, Kamigori, Hyogo 678-1205, Japan
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Saitoh Hidetoshi
Department of Materials Science and Technology, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
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