Elementary Analysis of Diamond-Like Carbon Film Formed by Focused-Ion-Beam Chemical Vapor Deposition
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概要
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This is the first report on the precise elemental composition of a diamond-like carbon (DLC) thin film fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD). The atomic fraction of the FIB-CVD DLC film has been determined to be $\text{C}:\text{Ga}:\text{H}=87.4:3.6:9.0$ at. % using Rutherford backscattering spectrometry (RBS) and elastic recoil detection analysis (ERDA). The hydrogen content of the FIB-CVD DLC film was lower than that of DLC films formed using other CVD methods.
- 2007-12-15
著者
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Niihara Koichi
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Kanda Kazuhiro
University Of Hyogo Laboratory Of Advanced Science And Technology For Industry
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KOMETANI Reo
University of Hyogo, Graduate School of Science, LASTI
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Suzuki Tsuneo
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Matsui Shinji
University Of Hyogo
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Igaki Jun-ya
University of Hyogo, Graduate School of Science, LASTI, Kamigori, Hyogo 678-1205, Japan
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Saikubo Akihiko
University of Hyogo, Graduate School of Science, LASTI, Kamigori, Hyogo 678-1205, Japan
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Kometani Reo
University of Hyogo, Graduate School of Science, LASTI, Kamigori, Hyogo 678-1205, Japan
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