Thermal Durability of Diamond Like Carbon Films Containing Tungsten Fabricated by Focused-Ion-Beam Chemical Vapor Deposition
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概要
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Diamond like carbon film containing tungsten (W-DLC) was fabricated by focused-ion-beam chemical-vapor deposition (FIB-CVD), and its thermal durability was investigated using near the carbon K-edge X-ray absorption fine structure (C-K NEXAFS) spectroscopy and a combination of Rutherford backscattering and elastic recoil detection analysis, in comparison with those of commercial DLC and W-DLC films. The concentration of W in the films did not decrease when the annealing temperature was increased, while the concentration of H did. The \text{sp^{2}}/(\text{sp^{2}}+\text{sp^{3}}) ratio of carbon atoms in the films increased with annealing temperature. The W-DLC film fabricated by FIB-CVD unchanged after annealing for 32 h at 873 K in vacuum. Its thermal durability was comparable to that of commercially available films.
- 2012-06-25
著者
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Suzuki Tsuneo
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Matsui Shinji
Laboratory Of Advanced Science And Technolgy For Industory Himeji Institute Of Technology
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Niibe Masahito
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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Kanda Kazuhiro
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kang Yuji
Laboratory of Advanced Science and Technology for Industry, Graduate School of Science, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Fujimoto Akihiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Okada Makoto
Laboratory of Advanced Science and Technology for Industry (LASTI), Graduate School of Science, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kanda Kazuhiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kang Yuji
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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