Annealing Effect of W Incorporated Diamond-Like Carbon Fabricated by Ga Focused Ion Beam Chemical Vapor Deposition
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概要
- 論文の詳細を見る
The effects of thermal annealing of W incorporated diamond-like carbon (W-DLC) films fabricated with focused ion beam chemical vapor deposition (FIB-CVD) were investigated using X-ray absorption fine structure near the carbon K-edge (C-K NEXAFS) and the combination of Rutherford backscattering (RBS) and elastic recoil detection analysis (ERDA). W-DLC films were annealed for 32 h at temperatures, T_{\text{a}}, between 673 and 1073 K. Comparing the T_{\text{a}} dependences of Ga and H contents obtained from RBS-ERDA and the \mathrm{sp}^{2}/(\mathrm{sp}^{2} + \mathrm{sp}^{3}) ratios from C-K NEXAFS, it was found that even a trace amount of W incorporation into DLC films fabricated by Ga+ FIB-CVD may cause a significant \mathrm{sp}^{3} \rightarrow \mathrm{sp}^{2} structural change.
- 2011-06-25
著者
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Ito Haruhiko
Department Of Chemistry Faculty Of Science The University Of Tokyo
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Suzuki Tsuneo
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Wada Akira
Department Of Applied Chemistry Graduate School Of Engineering Nagoya Institute Of Technology
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Niibe Masahito
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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Niibe Masahito
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Kanda Kazuhiro
Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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Wada Akira
Department of Materials Science and Technology, Nagaoka University of Technology, Nagaoka, Niigata 940-2188, Japan
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Kanda Kazuhiro
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Kamigori, Hyogo 678-1205, Japan
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