Influence of Organic Contaminant on Breakdown Characteristics of MOS Capacitors with Thin SiO_2
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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Fujii Toshiaki
Ebara Co. Ltd.
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YOKOYAMA Shin
Research Center for Nanodevices and Systems, Hiroshima University
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Yoshino Takenobu
Research Center For Nanodevices And Systems Hiroshima University
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SUZUKI Tsukuru
Ebara Research Co., Ltd.
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Suzuki Tsuneo
Extreme Energy-density Res. Inst. Nagaoka Univ. Of Technol.
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Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
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Yokoyama S
Research Center For Nanodevices And Systems Hiroshima University
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Yokoyama S
Department Of Innovative And Engineered Materials Tokyo Institute Of Technology
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Suzuki Tsukuru
Ebara Research Co. Ltd.
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