Influence of Organic Contaminant on Trap Generation in Thin SiO_2 of Metal-Oxide-Semiconductor Capacitors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-07-15
著者
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Fujii Toshiaki
Ebara Co. Ltd.
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YOKOYAMA Shin
Research Center for Nanodevices and Systems, Hiroshima University
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Yoshino Takenobu
Research Center For Nanodevices And Systems Hiroshima University
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Yokoyama Shin
Research Center For Integrated Systems Hiroshima University
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Yokoyama S
Research Center For Nanodevices And Systems Hiroshima University
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Yokoyama S
Department Of Innovative And Engineered Materials Tokyo Institute Of Technology
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